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Doctoral Thesis
DOI
10.11606/T.18.2016.tde-02052016-132832
Document
Author
Full name
Luís Antônio Oliveira Araújo
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Carlos, 2015
Supervisor
Committee
Fortulan, Carlos Alberto (President)
Bianchi, Eduardo Carlos
Foschini, Cesar Renato
Jasinevicius, Renato Goulart
Morelli, Márcio Raymundo
Title in Portuguese
Estudo do corte abrasivo de quartzo para a fabricação de geradores piezelétricos
Keywords in Portuguese
Dicing saw
Energy harvest
Corte abrasivo
Geradores piezelétricos
Quartzo
Abstract in Portuguese
O presente trabalho trata do estudo do fatiamento de cristais de quartzo quanto as suas características e influências na fabricação de micro sistemas eletromecânicos (MEMS). A metodologia é iniciada pelo projeto estruturado de um MEMS, convergindo para um gerador energia elétrica do tipo energy harvest, capaz de gerar energia limpa, renovável, de escala reduzida (micro componente), de baixa potência e com vistas para aplicação comercial. Geração de energia tem se tornado um tema cada vez mais frequente, em especial energia para sistemas autônomos (wireless) aonde o uso de baterias é restritivo ou até mesmo inviável devido às dimensões e dificuldade de manutenção. A fabricação de MEMS é a etapa de maior investimento financeiro e por consequência, maior estudo. No caso do gerador de energia, a ênfase recai sobre os processos de corte, que consomem a maior parte do processo fabril. O objetivo do presente trabalho é avaliar o processo de corte abrasivo do quartzo e a influência dos defeitos impregnados pelo processo, sobre o desempenho de geradores de energia piezelétricos baseados em quartzo sintético e natural. Os processos de corte com uso de fita abrasiva (band saw) e disco abrasivo (dicing saw) se destacaram devido aos bons resultados, disponibilidade, produtividade e baixo custo. Procedimentos de corte também foram realizados em outros materiais - Alumina Policristalina 99,8% e Silício (111) - como estudo comparativo das características do mecanismo de remoção de material aplicado aos processos de corte abrasivos. Os parâmetros de corte foram trabalhados em busca de melhor qualidade, que significa redução da impregnação de falhas (principalmente, o chipping e backside chipping) e melhor acabamento das superfícies geradas pelo corte final. Foram obtidas peças nos planos AT, X, Y e Z, com espessuras a partir de 0,5 mm, segmentadas em larguras de 1 a 7 mm.
Title in English
Study of abrasive dicing of quartz for piezoelectric energy harvest device manufacturing
Keywords in English
Abrasive cut
Dicing saw
Energy harvest
Generator
Quartz
Abstract in English
This work is a study of characteristics and influences of cutting process in manufacturing of microelectromechanical systems (MEMS) based on quartz single crystal. The methodology starts by the structured design of a MEMS device, converging to an electric power generator device, type energy harvest that generates clean energy, renewable, with small dimensions (micro component) and low power. Power generating has become a frequent topic, especially the power generation for wireless devices systems, which use of batteries can be restrictive or even impracticable because of dimensions and difficult of maintenance. The base of the study is the process manufacturing of MEMS, which is the major investment and because of this, the most studied stage. In the case of a power generator, the emphasis is on the cutting process that consumes most part of the work flow. The objective of this work is evaluate the abrasive cutting process of quartz and the influence of defects generated by the cutting process applied to the performance of piezoelectric power generators based on synthetic and natural quartz crystal. The abrasive cutting process of band saw and dicing saw were featured due availability and high productivity with low cost. Procedures of cutting were also applied in other materials - Alumina Polycrystalline 99,8% and Silicon (111) - as comparison for material removal mechanism in cutting process. The process parameters were optimized to reach better cutting quality, which means reduction in faults (mainly, chipping and backside chippings) and better surface finishing from cutting process. It was obtained pieces from AT, X, Y and Z cutting plans, with thickness starting from 0,5 mm and widths from 1 to 7 mm.
 
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Publishing Date
2016-05-09
 
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