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Doctoral Thesis
DOI
10.11606/T.43.1997.tde-09122013-144958
Document
Author
Full name
Hector Trinidad Palacios
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 1997
Supervisor
Committee
Fantini, Marcia Carvalho de Abreu (President)
Mazzaro, Irineu
Oliva, Glaucius
Quivy, Alain Andre
Torriani, Iris Concepción Linares de
Title in Portuguese
Metodologia de Análise Estrutural de Super-Redes Cristalinas
Keywords in Portuguese
Energia nuclear
Poços quânticos
Abstract in Portuguese
Este trabalho teve por objetivo o desenvolvimento de uma metodologia de análise estrutural de heteroestruturas, ou seja, estruturas formadas pela combinação de materiais diferentes depositados em camadas alternadas. O trabalho focalizou aspectos não apenas referentes às técnicas de difração de raios X, comumente utilizadas na caracterização estrutural destes novos materiais, mas também se concentrou no desenvolvimento de cálculos teóricos da intensidade difratada pelos raios X, os quais, comparados com os dados experimentais, dão informação precisa acerca do que poderíamos denominar qualidade estrutural. Uma comparação entre resultados obtidos com a teoria Cinemática Dinâmica foram também explorados e o alcance das duas teorias foi discutido. Este procedimento, embora tenha sido aplicado para a análise de heteroestruturas a base de semicondutores cristalinos, pode também ser aplicado, por exemplo, ao estudo de heteroestruturas magnéticas. É sempre fundamental no processo de desenvolvimento de novos materiais caracterizar as amostras após o crescimento, a fim de comparar os resultados experimentais com os valores nominais obtidos do procedimento de deposição. Em particular, neste trabalho, a caracterização estrutural de super-redes deformadas de Si 1-xGex/Ge e Si/Ge, crescidas sobre substratos de Ge e Si, respectivamente, realizou-se através do uso de técnicas não destrutivas de difração de raios X, envolvendo a medição dos parâmetros próprios das super-redes como: período, número de camadas atômicas, parâmetros de rede e deformação.
Title in English
Methodology for structural analysis of crystalline superlattices
Keywords in English
Nuclear energy
Quantum wells
Abstract in English
The aim of this work was the development of a methodology for the structural analysis of heterostructures, i. e., structures formed by the combination of different materials, deposited as alternate layers. The work focused on aspects not only related to x-ray diffraction techniques, usually utilized for the structural characterization of these new materials, but also it concentrated on the development of theorical calculations of the x-ray diffracted intensity, which were compared with experimental data in order to determine the so-called structural quality. The results obtained with the Kinematical and Dinamical X-ray Diffraction theories were explored and the scope of both theories was discussed. Even though this procedure was applied to the analysis of heterostrutures based on crystalline semiconductors, it also can be used, for example, to the study of magnetic multilayers. It is always fundamental in the development process of new materials to characterize the samples after growth, in order to compare the experimental results with the nominal values obtained by the deposition procedure. ln particular, in this work, the structural characterization of Si1-xGex /Ge and Si/Ge strained superlattices, deposited on Ge and Si substrate, respectively, was performed by means of non-destructive x-ray diffraction techniques, measuring superlattices parameters as: periodicity, number of atomic layers, lattice parameters and strain.
 
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45894Palacios.pdf (47.25 Mbytes)
Publishing Date
2014-02-21
 
WARNING: The material described below relates to works resulting from this thesis or dissertation. The contents of these works are the author's responsibility.
  • FANTINI, M. C. A., PALACIOS, H. T., and CARVALHO, C. A. M. The structure of Si/Ge superlattices. In 8th Brazilian Workshop on Semiconductor Physics, Águas de Lindóia, 1997. Brazilian Journal of Physics., 1997.
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