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Master's Dissertation
DOI
10.11606/D.43.1999.tde-19062015-165612
Document
Author
Full name
Marcilei Aparecida Guazzelli da Silveira
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 1999
Supervisor
Committee
Salvadori, Maria Cecilia Barbosa da Silveira (President)
Faria, Roberto Mendonça
Quivy, Alain Andre
Title in Portuguese
Medidas de expoentes críticos de filmes de diamante por meio de microscopia de força atômica
Keywords in Portuguese
Expoentes críticos
Filmes de diamante
KPZ
Leis de escala
Microscopia de força atômica
Abstract in Portuguese
Neste trabalho investigamos a dinâmica de crescimento de filmes de diamante sintetizados por meio de deposição química a vapor ativada por plasma de microondas (CVD). A caracterização foi feita utilizando, fundamentalmente, microscopia de força atômica (AFM). Analisamos o comportamento da rugosidade dos filmes como função da escala de observação e do tempo de deposição. Dessa maneira verificamos a existência de leis de potência para o crescimento e determinamos os expoentes críticos associados a essas leis. Os resultados obtidos estão em bom acordo com o processo de crescimento descrito pela equação estocástica KPZ. Os mecanismos principais são a deposição aleatória de partículas na superfície, o crescimento lateral e a dessorção.
Title in English
Measures of critical exponents of diamond films using atomic force microscopy
Keywords in English
Atomic force microscopy
Critical exponents
Diamond films
KPZ
Scale laws
Abstract in English
Diamond films have been grown by Microwave Plasma assisted Chemical Vapor Deposition (CVD). The characterization has been made mainly by Atomic Force Microscopy (AFM). We could analyze the roughness behavior with the scale of observation and with the deposition time. We could determine the critical exponents associated with these laws. The results suggest that the growth process is in good agreement with the stochastic growth equation known as KPZ. The most important mechanisms are the random deposition, the lateral growth and the desorption.
 
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Silveira_1999.pdf (6.97 Mbytes)
Publishing Date
2015-06-22
 
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