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Master's Dissertation
DOI
10.11606/D.43.2000.tde-02082013-153443
Document
Author
Full name
Diogo Soga
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2000
Supervisor
Committee
Muramatsu, Mikiya (President)
Oliveira, Elisabeth Andreoli de
Sinatora, Amilton
Title in Portuguese
Medida de topografia de superfície usando a técnica de deslocamento de fase
Keywords in Portuguese
Deslocamento de Fase
Interferometria Laser
Retirada de Ambiguidade.
Técnica não-destrutiva
Topografia de Superfície
Abstract in Portuguese
Neste trabalho, medimos o perfil 3D de superfícies (microtopografia) utilizando uma técnica de interferometria óptica: Phase-Shi,ftzng (Deslocamento de Fase). Utilizamos um interferômetro do tipo Twyman-Green para produzir fi.guras de interferência da superfície analisada. Essas imagens foram armazenadas usando-se uma câmera CCD ligada à um microcomputador. Para obter a microtopografia, calculamos o Mapa de Fase a partir das imagens digitalizadas usando um programa de microcomputador. Posteriormente um outro programa removeu a ambiguidade da função tangente (unwrapping), pela Técnica do Autômato Celular, usada no cáiculo do Mapa de Fase. Então efetuamos os cálculos para determinar a microtopografia da superfície. Depois fizemos a análise da microtopografia, levantando informações relevantes para a sua caracterização. Analisamos objetos com alta refletividade (espelhos planos e redes de Ronchi) e obtivemos bons resultados. Também comparamos alguns dos resultados obtidos com a técnica de Deslocamento de Fase com os resultados obtidos pela análise de Franjas de Igual Espessura.
Title in English
Measurement of Surface Topography using the Phase Shift Technique.
Keywords in English
Laser interferometry
non-destructive technique
Phase Shift
Surface topography
Withdrawal of Ambiguity.
Abstract in English
In this work we measured the 3D profile of surfaces (microtopography) using a optical interferometric technique: Phase-Shifting. We used a interferometer of type Twyman-Green to produce interferograms from analyzed surface. These images was captured using a CCD camera that was linked to a microcomputer. To obtain a microtopography, we calculated the Phase Map using the digitalized images and a software of microcomputer. Then another program removed the wrapping of tangent fuction, using the Cellular-Automata Technique, that was used to calculate the Phase Map. So we calculated the microtopography of the surface. After we did the analyses of the microtopography, find out some important informations of its description. We studied objects with high reflectivity (plane mirrors and Ronchi ruting) and we obtained good results. Also we compared some results with that obtained by analyses of Fringes of Equal Thickness'
 
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32368SOGA2.pdf (2.28 Mbytes)
Publishing Date
2013-08-02
 
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