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Master's Dissertation
DOI
10.11606/D.43.2010.tde-26012011-114805
Document
Author
Full name
Wagner Wlysses Rodrigues de Araujo
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2010
Supervisor
Committee
Salvadori, Maria Cecilia Barbosa da Silveira (President)
Petri, Denise Freitas Siqueira
Santos, Antonio Domingues dos
Title in Portuguese
Modificação de superfície de diamante utilizando plasma e caracterização por kelvin force microscopy
Keywords in Portuguese
Filmes finos
Física da matéria condensada
Potencial elétrico
Superfície física
Abstract in Portuguese
Neste trabalho nós produzimos e caracterizamos superfícies de diamante policristalino com áreas seletivas oxidadas e fluoradas a partir de superfícies originalmente hidrogenadas, usando um canhão de plasma para bombardear a superfície do diamante. A técnica que foi utilizada para a produção de filmes de diamante com superfícies hidrogenadas foi a deposição química a vapor por plasma de microondas. A seletividade de área para posterior oxidação foi realizada através de litografia por feixe de elétrons. A oxidação e a fluoração das áreas selecionadas foi feita por plasma de oxigênio e hexaflureto de enxofre, respectivamente. As caracterizações foram realizadas através de microscopia eletrônica de varredura convencional, microscopia de força atômica, Kelvin Force Microscopy e medida de ângulo de contato.
Title in English
Modification of diamont surface using plasma and characterization by kelvin force microscopy
Keywords in English
Condensed matter physics
Electric potential
Physical surface
Thin films
Abstract in English
In this work we have formed and characterized polycrystaline diamond films with surfaces having hydrogen terminations, oxygen terminations, or fluorine terminations, using a plasma gun to bombard the diamond surface. The technique used for diamond films deposition with surfaces having hydrogen terminations was microwave plasma assisted chemical vapor deposition. The selected areas for oxidation and fluorination were prepared by electron beam lithography. The oxidation and fluorination of the selected areas were performed using oxygen and súlfur hexafluoride plasma, respectively. The samples were characterized by conventional scanning electron microscopy, atomic force microscopy, Kelvin force microscopy and contact angle measurement.
 
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AraujoWWR.pdf (14.36 Mbytes)
Publishing Date
2011-02-11
 
WARNING: The material described below relates to works resulting from this thesis or dissertation. The contents of these works are the author's responsibility.
  • Salvadori, M.C., et al. Termination of diamond surfaces with hydrogen, oxygen and fluorine using a small, simple plasma gun [doi:10.1016/j.diamond.2010.01.002]. Diamond and Related Materials [online], 2010, p. 324-328.
  • Salvadori, M. C., et al. Diamond surface modification using plasma. In 10th International Workshop on Plasma-Based Ion Implantation & Deposition, São José dos Campos, SP, Brasi, 2009. Abstracts of the 10th International Workshop on Plasma-Based Ion Implantation & Deposition., 2009. Abstract.
  • Salvadori, M.C., et al. Diamond surface with hydrogen, oxygen and fluorine terminations. In VIII Encontro sobre diamante, carbono amorfo, nanotubos de carbono e materiais relacionados, Aracajú, 2009. Resumos do VIII Encontro sobre diamante, carbono amorfo, nanotubos de carbono e materiais relacionados., 2009. Resumo.
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