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Master's Dissertation
DOI
10.11606/D.54.1985.tde-31082009-101352
Document
Author
Full name
Adao Antonio da Silva
Institute/School/College
Knowledge Area
Date of Defense
Published
São Carlos, 1985
Supervisor
Committee
Carvalho, Rene Ayres (President)
Castellano, Eduardo Ernesto
Pizani, Paulo Sérgio
Title in Portuguese
Construção e análise de um elipsômetro de compensador girante.
Keywords in Portuguese
Compensador
Elipsômetria
Elipsômetro
Filmes finos
Técnica elipsométrica
Abstract in Portuguese
Neste trabalho, descreveremos a teoria, a construção e algumas aplicações de um elipsômetro fotométrico de compensador girante e analisador fixo (RCFAE). Além disso, foram feitas medidas dos estados de polarização de um feixe de luz, bem como a medida da constante dielétrica complexa, ξ = ξ1 - ξ2, de um substrato de ouro, a fim de verificar o desempenho d instrumento. Também foi feita uma análise comparativa da sensibilidade (ou poder de resolução) do elipsômetro construído com a do elipsômetro de analisador girante. Além disso, mostraremos como os resultados das medidas, são independentes da intensidade da luz incidente.
Title in English
Construction and analysis of a photometric elipsometer with rotating compensator.
Keywords in English
Compensator
Elipsometer
Elipsometric technique
Thin films
Abstract in English
In this work we describe the theory, construction and most important applications of a photometric elipsometer with routing compensator and fixed analyzer. We also analyze the procedures for measuring the polarization states of a light beam and the complex dielectric constant of a substrate of gold, in order to verify the performance of instrument. A comparative analysis of the sensibility (or resolution power) of the elipsometer built with an elipsometer of routing was also made. We show that the results of the measurements are independent of the intensity of the incident light.
 
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Publishing Date
2009-09-03
 
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